Module 1
Introduction
1-11
The high-resolution SMU (HRSMU) has an innate 1 fA & 0.5 uV measurement resolution. The
optional ASU extends the HRSMU measurement resolution to 0.1 fA.
The ASU has another feature, built-in switching capability. It can switch between the SMU and an
auxiliary input (AUX input, two BNC).
If the CMU is connected to the AUX inputs, the ASU can switch between the low current and CV
measurements. Then connect a wire between the CMU return terminals of ASUs to make the return
path of measurement current. This is effective for accurate capacitance measurement. However, you
need to perform capacitance compensation by yourself.
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