KLA Tencor Alpha-Step IQ User Manual

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KLA Tencor Alpha-Step IQ Specifications

General

Brand	KLA Tencor
Model	Alpha-Step IQ
Category	Laboratory Equipment
Language	English

Summary

Safety Cautions

Equipment

Definitions

Scan Settings

Defines parameters for scanning, including length, speed, and resolution.

Sensor Settings

Configures sensor range, elevator position, and adjustment biases.

Analysis Parameters

Covers stylus force, contact speed, and required radius settings.

Operating Guide

Loading Samples

Steps for safely loading samples onto the ASIQ platform.

Recipe Management

Instructions for loading or creating measurement recipes.

Running a Scan

Procedure for initiating and monitoring a measurement scan.

Data Review and Unloading

Data Review

Options for leveling scan data and saving reports.

Unloading Samples

Steps for safely removing samples from the ASIQ.

Troubleshooting

Vibration Sources

Identifies potential sources of vibration affecting scan data.

System Limitations

Discusses limitations affecting measurement accuracy, like stylus slope.