KLA Tencor P-6 User Manual

One Technology Drive., Milpitas, CA 95035
Phone: (408) 875-3000 FAX: (408) 571-2722
P-16+ / P-6
User’s Guide
KLA-TENCOR CONFIDENTIAL
Family: Profiler Product Line: Profiler P1X / PX Model: P-16+ / P-6
Software Version 7.31/7.35 MNL, USER PN- 0142530-000 AB

KLA Tencor P-6 Specifications

General

Vertical Resolution	0.1 nm
Data Acquisition	High-speed data acquisition system
Wavelength Range	N/A (Contact method)
Spot Size	N/A (Contact method)
Applications	thin film thickness, surface roughness, step height