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General| Type | Surface Profiler |
|---|---|
| Measurement Technology | Stylus profilometry |
| Measurement Range | Up to 1 mm |
| Vertical Range | 1 mm |
| Vertical Resolution | 0.1 nm |
| Operating Environment | Cleanroom compatible |
| Maximum Scan Length | 200 mm |
| Wafer Size | Up to 300 mm |
| Non-Contact Measurement | No |
| Application | Surface topography |
| Lateral Resolution | 0.1 μm |
| Data Acquisition | High-speed data acquisition system |
| Stylus Force | Adjustable |
| Stylus Type | Diamond |
| Scan Area | 200 mm |
| Measurement Speed | Varies with scan parameters |
| Automation Compatibility | Yes |
| Applications | Semiconductor, data storage |
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