Stylus Change Procedure - Stylus Removal and Replacement KLA-Tencor P-16+ / P-6 User’s Guide
13-2 KLA-Tencor Confidential 0142530-000 AB
3/13/09
STYLUS REMOVAL AND REPLACEMENT 13
The following discussion contains procedures for changing the stylus in the sensor
assembly of the P-16+ / P-6 Profiler system.
Stylus replacement in the P-16+ / P-6 Profiler system is relatively simple.
Important:
Use only an approved stylus from KLA-Tencor.
Do not modify the measurement head in any way. If, while using the prescribed
procedure, there is difficulty in mounting the stylus, call KLA-Tencor Customer
Service.
Know the stylus type and radius for input later in the procedure.
Follow the instructions as presented in this section to avoid omitting steps.
The procedure consists of six parts:
Stylus removal procedure
Stylus replacement procedure
Scan Position Offset Calibration
CAUTION: The stylus tip is very fragile! When removing the stylus
from its shipping container, use stainless tweezers (422320) to hold
the arm while gently peeling back the foam. Grasp the arm in the
center section and lift the stylus out tip first. To place the stylus back in
its shipping container, place the rounded end into the round end of the
holder and slowly rotate the tip end down. Release the tip only when it
is properly positioned in the groove.
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