0142530-000 AB KLA-Tencor Confidential 15-1
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Preventive Maintenance - Introduction
PREVENTIVE MAINTENANCE Chapter 15
15
INTRODUCTION 15
This chapter describes:
Periodic Preventive Maintenance
PERIODIC PREVENTIVE MAINTENANCE 15
The reliable operation of the P-16+ Profiler system is dependent on its proper
maintenance. The most important part of the system’s maintenance program is
periodic Preventive Maintenance (PM). The following maintenance procedures are
divided into periodic categories. Each task in the periodic lists is actually a procedure.
Where possible, the approximate time required for performing the designated task is
specified so maintenance technicians can plan system down-time and allot the proper
amount of time for the associated tasks. Perform the tasks in the order they appear in
the tables.
Each periodic PM procedures list is independent of the others. This means that
several sets of procedures are often required in the same time interval. For example,
the weekly PM procedures and monthly PM procedures would both be performed in
the same week that the monthly PM procedures are due.
Weekly PM Procedures 15
Table 15.1 Weekly PM Procedures
TASK # DESCRIPTION REASON RESOURCES TIME
1.
Run the Applied Force Calibration. To verify that the correct
stylus force is being used
2.
Ensure that the hard disk capacity is
less than 70% full.
To prevent system file
corruption
Windows Explorer
3.
Perform PBackup To prevent loss of date in
case of an unexpected
failure
See the PBackup section in
this manual
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