Analyzing 3D Scan Data - Saving Scan Data KLA-Tencor P-16+ / P-6 User’s Guide
7-40 KLA-Tencor Confidential 0142530-000 AB
3/13/09
5. Go to the Operator panels, and click e of the buttons for:
Subtraction or addition
Division or multiplication
The Processing Formula above the panels displays the selection.
Scale Factor sets the value for Operator 2.
If division or subtraction are not being performed on the data, go to the
Scale Factor field, and enter 1.
6. Click the
Apply button to perform the operations.
7. To revise the operations and recalculate, click the
Undo button.
8. When the results are satisfactory, click the
Close button.
A Save message dialog box appears.
9. Click
OK to save the resulting image.
SAVING SCAN DATA 7
Scan data can be saved for reviewing at a later time. This is especially important
because the data that is saved, using software version 6.1 or newer, can be reanalyzed
at a later date using different scan parameters.
In addition to saving the 3D data, current slice data can be save. This procedure is
covered at the end of this section.
Saving 3D Scan Data 7
1. Click File in the Menu Bar to display the File menu.
2. Select
Save Data…
The Save Scan Data dialog box appears.
3. Click the menu arrow next to
Save In to reveal the available drives and
directories.
4. Select the drive and directory from the drop-down menu.
5. Double-click the folder that the data is to be stored in. A list of all current data
files appear.
6. Enter a name for the data set in the File name variable box.
7. Click
Save to save the data in the new file.
Once a data set has been saved, it is added to the Scan Data catalog. The Scan
Data catalog window allows selection of individual data sets for reviewing.
Unwanted data sets can be deleted.
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