KLA Tencor P-16+ - Figure 3.24 Feature Detection Point Locations on a Step

0142530-000 AB KLA-Tencor Confidential 3-33
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Scan Recipes - Creating and Editing a Scan Recipe
Feature
This parameter allows the user to choose between six different features that can be
detected and identified during a scan.
Figure 3.24 Feature Detection Point Locations on a Step
Example of a Step feature
A trace of the Step feature
illustrated above.
DownEdge
DownBaseUpBase
UpEdge
DownBase
DownEdge UpEdge
UpBase
A trace of the reverse Step
feature.
Figure 3.25 Feature Detection Point Locations for Convex and Concave
A trace of the Convex feature.
A trace of the Concave feature.
The word Convex, as used in
feature detection, is the point at
the apex of the convex trace.
The word
Concave, as used in
feature detection, is the point at
the apex of the concave trace.