KLA Tencor P-16+ - Figure 3.68 Feature Find Parameter Definition; Table 3.27 Feature Find Recipe Parameters

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3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Scan Recipes - Feature Find
recipe and then clicking the Define button. If the option Model Feature is
selected the recipe editor selections will change slightly to display different
options. Table 3.27 contains a short description of the recipe parameters. Each
parameter is discussed in detail as well.
Figure 3.68 Feature Find Parameter Definition
Table 3.27 Feature Find Recipe Parameters
Parameter Setting Sensor or
Sample
Oval,
Trench or
Model
Description
Trench/Line Both Trench Feature Find scan looks for a feature that has
dimension in the x direction only, such as a trench.
Model Feature Both Model Feature Find scan looks for the model, which is a
saved scan, performing a pattern recognition match.
Search Patterns Both All Defines the pattern for data collection during the
feature find scan, such as center outward.