Configuration - Precision Locators (P-16+ Only) KLA-Tencor P-16+ / P-6 User’s Guide
14-24 KLA-Tencor Confidential 0142530-000 AB
3/13/09
Precision Locators - Description 14
Precision locators are fixtures that provide for exactly positioning of a sample relative
to a fixed reference point. KLA-Tencor provides the following types of precision
locators:
Wafer Precision Locators 14
2-in. for Wafer with Flat/Square Substrate
3-in. for Wafer with Flat/Square Substrate
4-in. for Wafer with Flat/Square Substrate
4-in. for Wafer with Notch
5-in. for Wafer with Flat/Square Substrate
5-in. for Wafer with Notch
6-in. for Wafer with Flat/Square Substrate
6-in. for Wafer with Notch
Disk Precision Locators 14
These locators are used for holding hard disk samples to the stage. They bolt on top of
the standard stage table. Note: These locators have to be purchased separately.
Instructions for installing precision locators can be found in Installing the
Precision Locator: on page 14-19,
Disk precision locators include
48-mm for Disk
65-mm for Disk
95-mm for Disk
Adjustable Three Point Disk Locator (48 mm, 65 mm, and 95 mm)
Stress Precision Locators 14
These locators are used for holding wafers in place, suspended at three points, for
measurement of stress related to a deposition on the wafer surface. The Manual Load
Stress Locator is attached to the stage table. The Adjustable Stress Locator is mounted
to its own base place that is secured to the stage.
Stress Locators
For 4 in. wafer with a flat or square substrate
For 4 in. wafer with notch
For 5 in. wafer with a flat or square substrate
For 5 in. wafer with notch
For 6 in. wafer w/flat or square substrate
For 6 in. wafer with a notch
To Next Page
Loading...
