KLA Tencor P-16+ - Figure 3.56; Figure 3.57 Multiple Bins (Mode) Used to Define a Plane; Histograms of Scans a and B

0142530-000 AB KLA-Tencor Confidential 3-73
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Scan Recipes - Creating and Editing a Scan Recipe
The user can set a percentage factor such that, if the bin containing the most data
points (reference bin) has a neighboring bin that contains the user set percentage of
the number of data points in the reference bin, it is also considered as part of the same
mode and used in the leveling procedure.
Figure 3.56 Histograms of Scans A and B
Number of data
points in each bin.
2
10
6
8
4
12
14
16
18
20
Z Min
Lowest Plane
Z Mid
Most Populous Plane
Z Max
Highest Plane
12345678 910111213Bin Number
Number of data
points in each bin.
2
10
6
8
4
12
14
16
18
20
Z Min
Lowest Plane
Z Mid
Most Populous Plane
Z Max
Highest Plane
12345678 910111213Bin Number
Scan A
Scan B
Figure 3.57 Multiple Bins (Mode) Used to Define a Plane
Z Max
Highest Plane
Z Mid
Most Populous
Z Min
Lowest Plane
Scan B