KLA Tencor P-16+ - S Aving S Equences

0142530-000 AB KLA-Tencor Confidential 6-47
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Sequence Recipe and Data - Sequencing with Site-by-Site Pattern Recognition (P-16+
8. Click OK to set the options and close the dialog box.
SEQUENCING WITH SITE-BY-SITE PATTERN RECOGNITION (P-16+ ONLY) 6
Sometimes it is more effective to position a scan relative to a taught feature.
Site-by-Site Pattern Recognition stores an offset from a taught pattern for any scan in
the sequence. The pattern must first be taught the “home” feature, then teach the scan.
With Site-by-site Pattern Recognition enabled, the instrument stores the scan position
as an offset from the taught feature.
1. In the
Options section of the Sequence Editor, click the drop-down button of the
Mode option. (See Table 6.5 on page 6-24.)
2. Click the Site-by-site Pattern Rec. option. (See Table 6.5 on page 6-24.)
3. Teach Pattern Recognition for the two initial deskew sites. (See Step 10 on page
-8
through Step 16 on page -9.)
4. Insert Scan recipes for the measurement sites. (See STEP 4 ON PAGE -12.)
5. Click the site in the Sequence list to be taught.
6. Click the
Teach Pat button, or click the Use Previous Site button to use the
pattern from previous site.
The
Pattern Rec. Deskew Teach Window appears.
7. Teach a
Pattern Rec. feature near the intended scan location, following the
guidelines in Table 6.10 and Table 6.11 .
8. Click
OK.
9. With the site still highlighted, click the Teach Loc button.
10. Teach the location for the actual measurement. This position is recorded as an
offset from the
Pattern Rec. site.
11. Click
OK.
12. Repeat for all sequence sites.
SAVING SEQUENCES 6
Sequences can be saved on the hard drive or network drive
Perform Deskew
Twice to Align Theta
With a single deskew operation, there is no stage rotation to
compensate for the small rotational error in sample
placement. By enabling this option in the
Pattern Recognition
and Deskew Options
dialog box, a second deskew is
performed to compensate for this error. This allows accurate
sample rotations within a sequence.
Table 6.12 Groping Parameters (Continued)
Parameter Description
NOTE: For SEMI compliance, both scan recipes and sequences
share the same directory. This means that a sequence cannot have
the same name as an existing recipe.