KLA Tencor P-16+ - Table 4.5 Actions Menu; Table 4.6 Sample Menu; Table 4.7 Vacuum Menu

0142530-000 AB KLA-Tencor Confidential 4-7
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide XY View Screen - Starting the XY View Application
Actions Menu
Sample Menu
Vacuum Menu
Table 4.5 Actions Menu
Actions Menu Description
Start Scan
Starts the scan process.
View Scan
Changes to the View Scan window.
Table 4.6 Sample Menu
Sample Menu Description
Manual Load
Moves the stage towards the front door. This is
used for loading wafers.
Load/Unload
Not applicable for the P-16+ Profiler system.
Initialize Handler
Not applicable for the P-16+ Profiler system.
Pod Operations…
Not applicable for the P-16+ Profiler system.
Change Configuration
This brings up the
Safe Area configuration box.
Table 4.7 Vacuum Menu
Vacuum Menu Description
Off
Not applicable for P-16+ Profiler systems. The
vacuum status is set using a manual switch next to
the door.
On
Not applicable for P-16+ Profiler systems. The
vacuum status is set using a manual switch next to
the door.