Sequence Recipe and Data - Editing the Options Field in the Sequence Editor KLA-Tencor P-16+ / P-6 User’s Guide
6-24 KLA-Tencor Confidential 0142530-000 AB
3/13/09
Set Deskew Mode 6
Click the Mode drop-down menu (see Figure 6.23), and select the from the following
Sequence modes. (See Table 6.5)
Set Scan Status Option if
Pattern Recognition Fails
1. Click the If Fail drop-down menu, and select the action to take if the pattern
recognition fails to find a site. (See Table 6.6.)
NOTE: Pattern Rec. Deskew is an option for P-16+ only. P-6 only
supports no deskew and manual deskew.
Table 6.5 Mode Drop-down Menu Options
Mode Description
No Deskew The sequence contains no deskew points for
alignment.
Manual Deskew Deskew points are set and must be confirmed
manually by the operator.
Pattern Rec. Deskew
(P-16+ Only)
Deskew points are set using the Pattern Recognition
option.
Site-by-Site Pattern
Recognition (P-16+ Only)
Scan sites are set relative to a Pattern Recognition
site and deskew is performed by pattern recognition.
Site-by-Site No Deskew
(P-16+ Only)
Each site is scanned without deskew.
CAUTION: It is important that when scanning with Pattern
Recognition, use the same zoom setting for the scan that was used to
capture the pattern. If zoom is used during the procedure, always
zoom completely out before starting the scan. If a particular zoom
setting is required, use the Zoom-lock feature to ensure that the zoom
setting remains unchanged throughout the procedure.
Table 6.6 If Fail Drop-down Menu
Feature Description
Operator Assist Hold the sequence until Operator Assistance is
achieved.
Skip, No Measurement Measurement of that wafer is suspended.
Cancel Sequence Sequence is suspended. User must restart the
sequence.
Proceed Measurement Continue with the next site as if the scan had
worked.
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