KLA Tencor P-16+ - Chapter 12 Calibrations; Standard Calibration Matrix

0142530-000 AB KLA-Tencor Confidential 12-1
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Calibrations - Standard Calibration Matrix
CALIBRATIONS Chapter 12
12
STANDARD CALIBRATION MATRIX 12
The system is facilitated by a series of interconnected calibrations. The
interdependency of the calibrations makes it important that those who calibrate the
systems understand the which calibrations affect other calibrations. When performing
any of the calibrations for the system, ensure that all prerequisite calibrations are
performed prior to performing the target calibration. When the target calibration is
completed, ensure that any necessary subsequent calibrations are performed or the
possibility exists for inaccurate scans.
APPLIED FORCE CALIBRATION 12
Check the Calibration
Matrix on page 12-1 for
possible interaction with
other calibrations.
Introduction 12
Applied force is the force between the stylus tip and the sample when the stylus is in
contact with the sample. Mechanical changes in the stylus arm can affect calibration
settings.
Table 12.1 Standard Calibration Matrix
Calibration to be
Performed
Calibration
Prerequisites
Post Calibration
Requirements
System Performance Results
Applied Force none none Protects stylus and sample during nulling procedure.
Video Calibration Applied Force none Objects chosen (clicked on) in the screen are
accurately positioned in the center of the screen.
Improves accuracy of pattern recognition deskew and
site-by-site pattern recognition.
Scan Position
Offset Calibration
Applied Force,
Video
none When performing a scan with the sample stage, the
general location taught for the scan is accurate. The
scan occurs very near the taught position.
Step Height Applied Force,
Scan Position
Offset
none Feature steps on the sample surface are more
accurately measured.
Radius of Curvature Applied Force,
Step Height
none Radii of curved surfaces are more accurately
measured.
Level Applied Force none Ensures that the stylus does not exceed its vertical
range due to the excessive tilt or level orientation of the
stage.
Lamp Balance Applied Force,
Drop Timer
none
Drop Timer Applied force none