KLA Tencor P-16+ - Analysis Screen with View; Figure 7.29

Analyzing 3D Scan Data - Saving Scan Data KLA-Tencor P-16+ / P-6 User’s Guide
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3/13/09
3. Choose the desired slice direction. Click Tools to display its menu. (See Figure
7.29.)
4. Select Cross Section Tool from the Tools menu to display its menu. (See Figure
7.29.)
5. Choose the desired cross section tool for the slice direction. (See Figure 7.29.)
6. For the
Horizontal and Vertical tools, click and drag the slice line to the desired
location on the 3D image to display the 2D trace of the scan at that location. For
the
Unlock Cross-Section tool, click and drag the slice line end points to the
desired location on the border of the image as seen in Figure 7.30.
Figure 7.29 Analysis Screen with View
Step 3 Click Tools to
display its menu.
Step 4 Click
Cross
Section Tool
to display
its menu.
Step 5 Choose the desired
slice direction.
Unlock
Cross-Section
is chosen,
making any direction slice
possible.