KLA Tencor P-16+ - Figure 3.14 Data Collection When Using a Large Radius Stylus

Scan Recipes - Creating and Editing a Scan Recipe KLA-Tencor P-16+ / P-6 User’s Guide
3-18 KLA-Tencor Confidential 0142530-000 AB
3/13/09
If the Stylus chosen is small enough to detect the features of interest in the scan,
then a sampling rate and scan speed should be optimized to accurately record the
level of detail required from the scan.
Figure 3.14 Data Collection When Using a Large Radius Stylus
Stylus Path A (large radius stylus) -
Low Frequency Data Collection
Low and High Frequency Data Traces
are nearly the same since a large radius
stylus was used.
Stylus Path A (large radius stylus) -
High Frequency Data Collection
Low Frequency Data Trace
High Frequency Data Trace
Sample Surface