KLA Tencor P-16+ - Table 3.17 Range and Resolution Scan Parameters for the Microhead V LF Head; Table 3.18 Range and Resolution Scan Parameters for the Microhead V SR Head; Table 3.19 Range and Resolution Scan Parameters for the Microhead V XR Head

0142530-000 AB KLA-Tencor Confidential 3-29
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Scan Recipes - Creating and Editing a Scan Recipe
Range/Resolution
This parameter sets the maximum size limit of the features that can be scanned in
each given range, and the minimum feature size that can be resolved (positively
detected). Three ranges are available. (See Table 3.17.)
Table 3.17 Range and Resolution Scan Parameters for the MicroHead V LF Head
Vertical Range (μm) Resolution (Å)
± 3.2 (6.5 total) 0.004
± 13 (26 total) 0.016
± 65 (131 total) 0.08
Table 3.18 Range and Resolution Scan Parameters for the MicroHead V SR Head
Vertical Range (μm) Resolution (Å)
± 6.5 (13 total) 0.008
± 32 (64 total) 0.04
± 173 (327 total) 0.2
Table 3.19 Range and Resolution Scan Parameters for the MicroHead V XR Head
Vertical Range (μm) Resolution (Å)
± 6.5 (13 total) 0.008
± 65 (131 total) 0.08
± 500 (1000 total) 0.6
NOTE: The Resolution numbers in Table 3.17, Table 3.18, and
Table 3.19 are theoretical. Noise levels effect the resolution.