KLA Tencor P-16+ - Figure 3.51 Bearing Ratio and Cutting Depth Parameters; High Spot Count and Peak Count

0142530-000 AB KLA-Tencor Confidential 3-67
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Scan Recipes - Creating and Editing a Scan Recipe
High Spot Count and Peak Count 3
Access the High Spot Count and Peak Count Display Window by clicking the High
Spot Count/Peak Count
button in the Recipe Editor. (See Figure 3.51.)
High Spot Count (HSC) 3
High Spot Count is the number of profile peaks per unit of length projecting through a
reference line parallel to and at a given height above, a line drawn parallel to the mean
line through the lowest point of the roughness trace. (See Figure 3.52).
The mean line is the line at the mean height of all data. Another line is drawn through
the lowest point in the trace, parallel to the mean line. The reference line is at a user
specified height above the lowest point line.
Figure 3.51 Bearing Ratio and Cutting Depth Parameters