0142530-000 AB KLA-Tencor Confidential 3-55
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Scan Recipes - Creating and Editing a Scan Recipe
Either one or both calculation options can be used. If both are used, two sets of
calculations are performed and presented in the Analysis screen.
Roughness and Waviness Parameters 3
Introduction 3
Roughness and Waviness are defined by the Long Wavelength Cutoff setting. In
general, when a long wavelength cutoff is set, the wavelengths greater than the cutoff
are defined as Roughness and those less than the cutoff are defined as Waviness.
(See Figure 3.43.) The long wavelength cutoff setting is generally determined by the
specific application for which it is to be used.
A filter is used to remove aspects of the data so other aspects can be more carefully
analyzed. As an example, the roughness could be filtered out so the waviness could be
better analyzed. (See Figure 3.44.)
Table 3.23 3D General Parameters
Parameter Description
Total Ind. Runout
(TIR3D)
This is the 3D Total Indicator Runout.
TIR3D is the difference
between the highest and lowest points in the scan.
SlopeX SlopeX refers to the slopes for lines in the plane:
The SlopeX is the slope along the X-direction
For the data set in any rectangular area (either a box or the
entire area), a plane can be established using the least squares
method.
SlopeY SlopeY refers to the slopes for lines in the plane:
The SlopeY is the slope along the Y-direction
For the data set in any rectangular area (either a box or the
entire area), a plane can be established using the least squares
method.
Peak 3D (Sp) Maximum Z value, measured relative to the leveled reference
plane.
Valley 3D (Sv) Minimum Z value, measured relative to the leveled reference
plane.
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