KLA Tencor P-16+ - 3 D Scan Information Field; Figure 5.7 3 D View Scan Screen During a Scan Sequence; Figure 5.8 3 D Scan Window

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View Scan Window - 3D Screen Function KLA-Tencor P-16+ / P-6 User’s Guide

5-10 KLA-Tencor Confidential 0142530-000 AB

3/13/09

3D Scan Information Field 5

3D Scan Recipe Column 5

The first column in the Scan Information Field is the scan Recipe column. It contains

the scan recipe name and some of the critical determining recipe parameters.

The 3D column adds

Trace to information presented in a 2D parameter set.

Figure 5.7 3D View Scan Screen During a Scan Sequence

When performing a

sequence, the Sequence

information is added to the

information set.

Figure 5.8 3D Scan Window - Scan Information Field

The only parameter in this

field that is different from

the 2D field is

Trace:

KLA Tencor P-16+ - 3 D Scan Information Field; Figure 5.7 3 D View Scan Screen During a Scan Sequence; Figure 5.8 3 D Scan Window - Scan Information Field