KLA Tencor P-16+ - Table 3.22 2 D General Parameters

0142530-000 AB KLA-Tencor Confidential 3-53
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Scan Recipes - Creating and Editing a Scan Recipe
Each parameter is discussed below. (See Figure 3.42.)
Table 3.22 2D General Parameters
Parameter Description
Step Height (StpHt) The difference in height between the left and right measurement
cursors positions. Each cursor position is an average of the area
between the cursor boundaries. The difference is between
these averages.
Total Indicator Runout
(TIR)
The difference between the highest and lowest points in the
scan.
Average Height (Ave) The average height of all data points between the measurement
cursors relative to the leveled baseline. (ANSI)
Slope The ratio of the difference in vertical positions to the difference in
horizontal positions of the measurement cursors. The slope is
reported as an angle in degrees.
NOTE: The position of each cursor is taken
to be the horizontal midpoint of each delta
cursor band, and the data value at this
location is the average of the vertical values
within these bands. (ANSI)
Radius The distance from the center of curvature of the profile arc
(assuming a circular profile within the sampling length) to the
profile. The measurement cursors define two points of a circular
arc. A least squares calculation is performed on the points
between the cursors. The normal trace should not be leveled
unless definite level reference points exist.
Area of Peaks (Area+) The total area bounded by the leveled baseline and the profile
where it rises above the baseline. (ANSI)
Area of Valleys (Area-) The total area bounded by the leveled baseline and the profile
where it descends below the baseline. (ANSI)
Total Ar ea (A re a) The sum of
Area of Peaks and Area of Valleys. The delta
cursors are not used. (ANSI)