Scan Recipes - Creating and Editing a Scan Recipe KLA-Tencor P-16+ / P-6 User’s Guide
3-28 KLA-Tencor Confidential 0142530-000 AB
3/13/09
Changing the Applied Force setting:
1. Click the menu arrow next to the variable box to display its menu.
2. Click the desired force setting.
Stylus Radius (μm)
Stylus Radius is the manufacturers stated radius of the stylus. The stylus radius cannot
be changed in this screen.
Use the Stylus Change Procedure to change the stylus radius setting. (See Stylus
Change Procedure on page 1.)
Recommended Maximum (mg)
Each stylus type is associated with a maximum applied force setting. The maximum
setting is deemed to be safe for the stylus and the sample while performing normal
scans. This force should not be exceeded.
Vertical Ranging Parameters (2D and 3D) - Scan Parameters Definition 3
Vertical Ranging contains two parameters: Range/Resolution and Profile Type. These
two parameters are used together to set up the system for:
Range: The maximum feature measurement limit (theoretical), up or down, that
is considered when scanning for a feature,
Resolution: The theoretical vertical resolution of the electronics.
Three set of ranges are available. The primary differences between the ranges are in
their resolution capabilities, and the ability in the 131
μm, 327 μm, and 1000 μm
range to set the direction in which the range is applied. The ranges are described
below.
Table 3.16 Stylus Force Ranges for the Different Head Configurations
MicroHead V LF MicroHead V SR MicroHead V XR
0.05-50 mg 0.5-50 mg 0.5-50 mg
CAUTION: Recommendations and limits are only correct if the “Stylus
Change Procedure” was followed when the stylus was installed.
To Next Page
Loading...