KLA Tencor P-16+ - Figure 3.15 Data Collection When Using a Small Radius Stylus

0142530-000 AB KLA-Tencor Confidential 3-19
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Scan Recipes - Creating and Editing a Scan Recipe
Figure 3.15 Data Collection When Using a Small Radius Stylus
Figure 3.16 2D Scan Options With Sampling Rate Menu
Stylus Path B (small radius stylus) -
Low Frequency Data Collection
Stylus Path B (small radius stylus) -
Medium Frequency Data Collection
Stylus Path B (small radius stylus) - High Frequency Data Collection
Low Frequency Data Trace
Medium Frequency Data Trace
High Frequency Data Trace
Sample Surface
As the Data Points get closer (higher frequency), the Data Trace
becomes more distinct, resembling Stylus Path B, which used a
Small Radius Stylus to scan.
Small Radius Stylus, Stylus Path B
Step 3 Click the menu
arrow next to the
Sampling Rate field.