KLA Tencor P-16+ - Figure 3.13 Scan Trace Comparison - Large Vs. Small Stylus Radius

0142530-000 AB KLA-Tencor Confidential 3-17
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Scan Recipes - Creating and Editing a Scan Recipe
Figure 3.13 illustrates the impact of stylus radius in generating a scan trace..
Comparing the Scan Path of the large radius stylus and the small radius stylus,
assessment can be made regarding the validity of higher frequency data
collection. In general, the larger radius styli do not detect the smallest features.
They give traces that can resemble a statistical average.
Figure 3.13 Scan Trace Comparison - Large vs. Small Stylus Radius
Stylus Radius
Stylus A with
large radius.
Sample Surface
Scan Direction
Stylus Radius
Stylus Path A
Stylus Path B
Stylus B with
small radius.