Scan Recipes - Creating and Editing a Scan Recipe KLA-Tencor P-16+ / P-6 User’s Guide
3-68 KLA-Tencor Confidential 0142530-000 AB
3/13/09
Projecting through means that the profile curve first climbs above the reference line
and then falls below it. Thus, if the profile rises above the reference line, descends
without falling below it, then rises again, multiple peaks are not identified.
Use the following procedure to set the 2D High Spot Count variables.
1. The option exists to create three 2D High Spot Count parameters. Click in up to
three empty checkboxes to put a check (9) in them and activate their variable
boxes.
2. The height can be set in either microns (
μm) or angstroms (Å). Determine which
units are going to be used and, if a change is necessary, click the menu arrow
under units to display its menu.
3. Click the desired unit signifier,
μm or Å.
4. The
Height is the distance up from the lowest point of the roughness trace.
To set or change the
Height, double-click the current Height variable and type in
the new height.
2D Mean Spacing Sm (1/HSC) 3
Mean Peak spacing is the mean value of the local peak spacing of the profile within
the sampling length. The peaks for High Spot Count are defined by the Height
parameter from the High Spot Count window. Spacing is the inverse of the count.
It is important to note that the
2D High Spot Count (HSC) and the 2D Mean Spacing Sm
(1/HSC)
are related. If running a scan in which these values are to be compared, the
height of both must be identical for the data to have direct correlation.
Use the following procedure to set the 2D Mean Spacing Sm variables.
1. The option exists to create three 2D Mean Spacing Sm parameters. Click in up
to three empty checkboxes to put a check (9) in them and activate their variable
boxes.
2. The height can be set in either microns (
μm) or angstroms (Å). Determine which
units are going to be used and, if a change is necessary, click the menu arrow
under units to display its menu.
3. Click the desired unit signifier,
μm or Å.
Figure 3.52 High Spot Count
1 count1 count 1 count
h
Lowest point of roughness trace
1 count
Reference Line
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