KLA Tencor P-16+ - Figure 5.3 2 D Scan Window - Scan Information Field; Scan Information Field - 2 D Sequence Recipe Column; Table 5.3 View Scan Screen - 2 D Location Information Column

0142530-000 AB KLA-Tencor Confidential 5-3
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide View Scan Window - 2D Screen Function
Scan Information Field - 2D Sequence Recipe Column 5
2D Sequence Column 5
The first column in the Scan Information field is the Sequence column. Table 5.3
presents a brief description of each parameter.
2D Recipe Column 5
The second column in the Scan Information Field is the Recipe column.
Table 5.1 presents a brief description of each parameter.
Figure 5.3 2D Scan Window - Scan Information Field
Sequence
Information
Scan Location
information
column.
Scan Recipe
information
column.
Table 5.3 View Scan Screen - 2D Location Information Column
Parameter Description
Sequence The Sequence Recipe Name
Step Shows which step of the total number of step the system is
currently performing.
Slot N/A – No handler for P-16+ Profiler.
Lot ID The name of the sample lot. This is assigned by the
operator or the system defaults to Recipe Name. (See
Table 6.7 on page 6-26.)