KLA Tencor P-16+ - Chapter 3 Scan Recipes; Ntroduction

0142530-000 AB KLA-Tencor Confidential 3-1
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Scan Recipes - Introduction
SCAN RECIPES Chapter 3
3
INTRODUCTION 3
The P-16+ / P-6 Profiler system performs scans of sample surfaces using recipes that
set the parameters of each scan. Each recipe can be used alone or, in conjunction with
other recipes in a sequence to gather necessary data from a given sample. Some
system calibrations use recipes to perform vital data gathering and analysis so the
system can be calibrated for optimum performance.
The P-16+ / P-6 Profiler system is capable of high resolution scans in two or three
dimensional formats. The three dimensional scan uses a combination of parallel
traces. The length of the traces, the distance between parallel traces, and the
frequency of data point collection are all defined in the recipe. The two dimensional
trace is a collection of data points made at a recipe specified frequency either as one
trace, or a recipe specified number of traces over the same scan position, which are
then averaged. The data is then presented in either a two or three dimensional
graphical format for observation and analysis.