KLA Tencor P-16+ - Figure 3.27; Scan Trace (Red) with First Derivative (Dark Blue) Overlaid on the same Graph

0142530-000 AB KLA-Tencor Confidential 3-37
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Scan Recipes - Creating and Editing a Scan Recipe
Bump and Model Feature Detection
Figure 3.27 Scan Trace (Red) with First Derivative (Dark Blue) Overlaid on the
Same Graph
Deriviative without
filtering does not
produce clear
inflection points at
the rising and
falling edges.
Deriviative with
filtering shows
clear inflection
points at the rising
and falling edges.