Scan Recipes - Creating and Editing a Scan Recipe KLA-Tencor P-16+ / P-6 User’s Guide
3-36 KLA-Tencor Confidential 0142530-000 AB
3/13/09
Min. Plateau Width
Minimum Plateau Width defines the minimum horizontal distance between rising and
falling edges (or falling and rising edges). This parameter is useful to differentiate
between features of similar shape, but different width. It can also be useful to prevent
false detection of a feature.
Use values between 0.005 and 1000
μm.
Apply Gaussian Noise Filter Before Detection
This is used so that feature detection can detect designated features. (See Figure
3.27.) Up edge, up base, down edge, down base, convex, and concave Feature
Detection operate on the first derivative of the trace. As can be seen in the figure,
without any filtering the derivative does not have a clear inflection at the rising and
falling edges of the steps. Since each motion of the stylus up and down due to
roughness or noise is a change in slope, filtering for Feature Detection is critical to
smooth the profile and produce clear derivatives at the rising and falling edges, as can
be seen in the figure after applying a filter.
It does not apply the filter to scan used for parameter calculations. It is only used
for the purpose of Feature Detection. For use of the Gaussian Filter with scan data,
see Filters on page 3-38.
NOTE: It is always recommended to apply a filter to the data. Filtering
can be very useful to obtain robust Feature detection performance.
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