Analyzing 3D Scan Data - 3D Analysis Screen Features KLA-Tencor P-16+ / P-6 User’s Guide
7-12 KLA-Tencor Confidential 0142530-000 AB
3/13/09
Analysis Screen Side Toolbar Buttons 7
These buttons, located at the right of the image, are active in the Top View only
(looking directly down on the image surface). (See Table 7.6).
Analysis Screen Side Toolbar Button Functions 7
Statistics information box. This displays the statistics information box on the screen, usually beneath
the analysis image. The positioning can be manipulated.
Print. This causes the system to print the analysis information.
Positive Magnification. This causes the entire image to be magnified by one increment each time it is
clicked on. The image continues to grow in size, having its outside edges cropped as its size increases
past the image area of the screen.
Negative Magnification. This causes the entire image to be reduced in magnification by one
increment each time it is clicked on.
Move highlight planes... This moves each highlighted plane for visibility. Up to 10 planes can be
identified for viewing.
Table 7.5 Analysis Toolbar Buttons (Continued)
Button Description of Action
Table 7.6 Analysis Side Toolbar Buttons
Button Description of Action
Enable Analysis Tools (Top View). This button enables the remaining tools in this tool bar. It moves
the image to the Top View because all the tools require this view.
Disable analysis Tools. This button disables active tools. This includes the tools in this tool bar as well
as those in the top tool bar.
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