Sequence Recipe and Data - Creating a Sequence Recipe KLA-Tencor P-16+ / P-6 User’s Guide
6-10 KLA-Tencor Confidential 0142530-000 AB
3/13/09
Begin: Setting Deskew
Options
18. Deskew Options set the number of groping Layers, set the maximum and
minimum percentage match for identification of a feature, and offer the ability
to turn on or off Deskew Twice and Image Processing options. (See Groping
with Pattern Recognition (P-16+ Only) on page 6-44.)
Click
Deskew in the menu bar and then on Options... to display the dialog box.
(See Figure 6.11.)
19. To enable
Edge Based Pattern Rec., click to put a check in the check box. (See
“Edge Based Pattern Rec.” in Table 6.12 on page 6-45.)
20. Set the
Number of Groping Layers by clicking on the down-arrow and then
clicking on the desired number of layers and sites. (See Groping with Pattern
Recognition (P-16+ Only) on page 6-44 for more information on groping
layers.)
21. Set the
Minimum Match Score by double-clicking in the variable box and typing
in the new percentage. (See Figure 6.11.)
22. Set the
Minimum Score to Stop Groping by double-clicking in the variable box
and typing in the new percentage. (See Figure 6.11.)
23. To enable
Save/Apply Video Settings, click to put a check in the check box. (See
“Save/Apply Video Settings” in Table 6.12 on page 6-45.)
Figure 6.11 Deskew Options Dialog Box
Step 20 Click the
menu arrow and click
the desired groping
layers (sites).
Double-click in the
variable box and
enter the percentage.
Step 25 Click OK
when all settings
have been set and
confirmed.
Step 24 Click to
enable the Deskew
Option checkbox.
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