KLA Tencor P-16+ - The 2 D Stress Application Window (P-16+ and P-6); The Stress Screen Tool Bar; Table 9.1 Tool Bar Icons

0142530-000 AB KLA-Tencor Confidential 9-5
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Stress (Optional feature) - The 2D Stress Application Window (P-16+ and P-6)
THE 2D STRESS APPLICATION WINDOW (P-16+ AND P-6) 9
The Stress Screen Tool Bar 9
The Stress Screen tool bar shows all icons available in stress analysis. Icons are
enabled or disabled (grayed) when they do not apply. For example, the start button is
only available when the scan can be started in the stress recipe catalog.
Table 9.1 Tool Bar Icons
Button Action
Invokes the Stress Recipe Editor to add a new stress recipe.
This icon is only active if there is a change in a recipe or for saving a
new recipe. It saves changes to the current file.
Displays the Print dialog box for printing data on the current screen.
UnZoom removes the affect of the previous Zoom.
Zoom Mode (toggle) allows for higher resolution of the Y axis.
AutoScale On/Off (toggle) changes Y axis scale automatically to
keep the full scan in view.
Level (toggle) Levels the scan to adjust for chuck planarity.
Starts a scan using the current stress recipe.
Toggles to the XY View screen.
Enables 2D stress measurements.
Enables 3D stress measurements.