KLA Tencor P-16+ - Figure 3.43 Waviness Vs. Roughness; Figure 3.44 Roughness;Waviness Filter Analysis

Scan Recipes - Creating and Editing a Scan Recipe KLA-Tencor P-16+ / P-6 User’s Guide
3-56 KLA-Tencor Confidential 0142530-000 AB
3/13/09
For applications where the user is unsure of a specific long wavelength cutoff, use the
general rule of 1/5 the scan length. This means that for a scan of 50
μm, the cutoff
would be 10
μm.
Figure 3.43 Waviness vs. Roughness
Figure 3.44 Roughness/Waviness Filter Analysis
Scan Trace
Before Filter.
Waviness with
Roughness
filtered out
Roughness with
Waviness filtered
out.