KLA Tencor P-16+ - Feature Characteristics: Feature down or Feature up; Feature Depth; Height (Nm); Figure 3.74 5ΜM Lines Measurement Pattern; Width (ΜM)

Scan Recipes - Feature Find KLA-Tencor P-16+ / P-6 User’s Guide
3-94 KLA-Tencor Confidential 0142530-000 AB
3/13/09
Feature Characteristics: Feature Down or Feature Up 3
When using the Oval / Rectangle and Trench / Line search types the user must
define the physical characteristics of the feature. Feature Down or Feature Up
defines if the feature is below or above the sample surface. For example, a
line is a Feature Up and a contact would be a Feature Down.
Feature Depth / Height (nm) 3
When using the Oval / Rectangle and Trench / Line search types the user must
define the physical characteristics of the feature. In the Feature Depth / Height
the user must define the minimum and maximum feature depth that will be
accepted as the correct feature. For robust Feature Find performance, the user
should set the parameters relatively loose. For example, if the feature is a
500nm trench, the minimum and maximum should be set at about 350 to
650nm, respectively. The one exception to setting the parameters relatively
loose is if there are similar features that would be contained in the Feature
Find scan at a different depth. For example, if there is a 400nm trench near the
500nm trench, the minimum depth should be increased to about 450nm so that
the 400nm trench is not found during the Feature Find scan.
X Width (µm) 3
When using the Oval / Rectangle and Trench / Line search types the user must
define the physical characteristics of the feature. In the X Width the user must
define the minimum and maximum feature width that will be accepted as the
correct feature. The X Width that is used is the width at the sample surface.
For example, when measuring a contact, the width is at the top of the contact.
For robust Feature Find performance, the user should set the parameters
relatively loose. For example, if the feature is a 1
μm trench, the minimum and
maximum should be set at about 0.5 to 1.5
μm, respectively. There is one note
of caution. The width tolerance, maximum minus the minimum, defines the
Figure 3.74 5µm Lines Measurement Pattern