0142530-000 AB KLA-Tencor Confidential 13-1
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Stylus Change Procedure - Introduction
STYLUS CHANGE PROCEDURE Chapter 13
13
INTRODUCTION 13
Styli are available in various sizes for a variety of different scanning requirements.
Each stylus is a delicate tool and requires careful handling.
Styli are color-coded to indicate radius. Check the color band on the stylus arm
against the following table for the stylus radius.
Table 13.1 Available L-Stylus Radius
Color Code Band Stylus Radius (μm) Cone Angle (Deg.)
Red 12.5 60
Yellow 5.0 60
Green 2.0 60
Double Green 2.0 20
Orange 2.0 45
Black
a
a. For radius values, refer to the SEM documents provided with the stylus.
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NOTE: The Dual Blue band, 0.040 µm radius and 40° cone angle stylus
is only supported on the P-16+ profiler.
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0.3–0.8 85
Black
a
0.1–0.2 85
Dual Blue 0.040 40
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