KLA Tencor P-16+ - Setting the Magnification; Introduction

0142530-000 AB KLA-Tencor Confidential 4-9
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide XY View Screen - Setting the Magnification
SETTING THE MAGNIFICATION 4
Introduction 4
The system has an optical zoom function that allows the operator to view the sample
surface at different magnifications for feature identification and scan placement.
If the system has Pattern Recognition operating (P-16+only), zooming in and out
could prevent the system from performing accurately because the recognition
function also takes into consideration the size of the image as well as its shape.
(P-16+ Only) Rotates the stage in the theta counterclockwise
direction by one increment (as set in
Move Extents) per button
click. Click and hold the button for continuous movement.
(P-16+ Only) Rotates the stage in the theta clockwise direction by
one increment (as set in
Move Extents) per button click. Click and
hold the button for continuous movement.
Raises the measurement head away from the stage by one
increment per button click. Click and hold the button for
continuous movement.
Lowers the measurement head containing the sensor assembly to
the null position, with the stylus just above the surface, and
focuses the video image.
Changes to a higher magnification with each click.
Changes to a lower magnification with each click.
Starts the scan process.
(P-16+ Only) A toggle that lifts and drops the stylus.
Toggle button that moves the stage to and away from the Manual
Load position. Before each movement, the measurement head
moves to the set Z-height to protect the sensor assembly from
accidental contact.
Allows user to control the focus or elevation of the head by
selecting the button and then using the up or down arrow on the
keyboard. This feature is particularly useful for tricky sample
geometries.
Defines the distance the stage can be safely moved before the
elevator will lift the head to protect the stylus and sensor assembly
from damage due to tall features on the sample of sample locator.
Table 4.9 XY View window Tool Bar Buttons (Continued)
Button Description