Sequence Recipe and Data - Editing the Options Field in the Sequence Editor KLA-Tencor P-16+ / P-6 User’s Guide
6-26 KLA-Tencor Confidential 0142530-000 AB
3/13/09
1. Choose an option from the Save, Export, and Print options. (See Table 6.7.)
The Export Options also contain a choice of export file type. (See Table 6.8.)
The Print Option contain the following feature. (See Table 6.9.)
End: Set Data Options 2. Click OK to set the options.
Table 6.7 Save and Export Options
Feature Description
None Saves or exports no data.
Statistics Saves or exports only the statistics for the specified
parameters, the recipe ID, part ID, and sequence ID.
The results for each parameter at each measurement
site are not printed, saved, or exported. Statistics are
calculated for scans taken with the same recipe and
are saved only if two or more scans are taken with
that recipe.
Trace Data and Statistics Saves or exports everything, including the recipes
used, the raw data points for each scan, parameter
results, and the statistics.
Use Lot ID Prompts the operator to enter the Lot ID before
running the sequence, then saves or exports the data
under the Lot ID name.
Use Name Saves or exports the data under the sequence name
or a user-specified name. The Path button opens a
dialog box for designating the path of the desired file.
Use Operator ID Prompts the operator to enter their ID before running
the sequence. The data file contains the operator ID
but is still saved under the Lot ID or the
Use Name.
Table 6.8 Export Options
Feature Description
ASCII File Data is exported in ASCII code.
Binary File Data is exported in binary code.
Simple Binary File Data is exported in simple binary format.
Table 6.9 Print Option
Feature Description
Enable Auto Print Automatically prints data at the end of the sequence.
Click the
Details... button to open a standard print
dialog box and set print options.
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