KLA Tencor P-16+ - Viewing Multi Analysis Results

0142530-000 AB KLA-Tencor Confidential 6-35
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Sequence Recipe and Data - Using Multi Analysis In Sequence
a. Click its name in the list
b. Click
Edit recipe to change any parameters and filter settings. Cursor
positions can only be changed by entering them numerically.
c. Save the recipe.
d. To teach cursor positions later from the scan trace:
e. Click
Save As to create a new recipe even if no changes were made to the
recipe at this point.
f. Exit the Recipe Editor window to return to the Sequence Editor window.
g. Select the new recipe that was just created.
h. Click
Add to add the Scan recipe to the list.
6. Set up the analyzing Scan recipes:
a. Go to the
Scan Recipe catalog list, and click a Scan recipe containing the
required analysis settings.
This recipe should have the same scan length, scan speed, sampling rate,
stylus force, contact speed, and range as the scanning recipe.
b. Make changes to the Scan recipe as in Step 5b.
This step can also be performed before compiling the sequence list, using
the Scan recipe to scan the sample and teach the cursor positions.
c. Add the Scan recipe to the sequence list.
d. While the Scan recipe is still highlighted, click the
Multi Analysis button.
This instructs the instrument not to scan the sample again but to reanalyze
the data according to the recipe’s data analysis parameters. Note that the
Multi Analysis button is not active (dimmed) for the first recipe in a
sequence.
e. Repeat the process as many times as needed.
7. Click the
Sequence menu, and select Save As to save the sequence.
Viewing Multi Analysis Results 6
1. Tile the windows to display the Sequence Parameter Summary window and the
Scan Trace simultaneously.
2. Go to the Sequence Parameter Summary window:
 Site 1 shows data analyzed with the first Scan recipe in the sequence list.
 Site 2 data corresponds to the second Scan recipe, and so on with each
additional site.
3. To view each Scan recipe’s data set in both Trace and Summary windows:
a. Click the arrow in the
Recipe drop-down menu on the tool bar.
b. Select the Scan recipe.