KLA Tencor P-16+ - Table 3.6 Host Menu Options Description (Only Available with GEM;SECS Option); Table 3.7 Diagnostics Menu Options Description; Table 3.8 Loadport Menu Options Description; Table 3.9 Task Menu Options Description

0142530-000 AB KLA-Tencor Confidential 3-7
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Scan Recipes - Scan Recipe Catalog Screen Components
Table 3.6 Host Menu Options Description (Only available with GEM/SECS Option)
Host Menu Description
Go Offline This takes the P-16+ / P-6 Profiler system offline. This is used to prevent the
system from responding to a host during a user defined operation.
Attempt Online This attempts contact with the host to open the system communication link.
The system then operates according to its predetermined GEM parameters.
Local This is an Online state where there is communication with the Host but in which the
P-16+ / P-6 Profiler system controls the system’s operation.
Remote This is an Online state where there is communication with the Host and in which the
host controls the P-16+ / P-6 Profiler system operation.
Table 3.7 Diagnostics Menu Options Description
Diagnostics Menu Description
ARAMS - This function is not used by P-16+ / P-6 systems.
Table 3.8 Loadport Menu Options Description
Loadport Menu Description
Loadport - This function is not used by P-16+ / P-6 systems.
Table 3.9 Task Menu Options Description
Tasks Menu Description
Configuration - Link to the Configuration page.
Calibration - Link to the Calibration page.
Scan Catalog - Link to the Scan Catalog.
Database Catalog - Link to the Database Catalog.
Stress - Link to the Stress Function (optional feature).
Gem-Secs - Link to the GEM-SECS function (optional feature).
Defect Review - Link to the Defect Review function (optional feature).