0142530-000 AB KLA-Tencor Confidential 14-25
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Configuration - P-6 Precision Locators
P-6 PRECISION LOCATORS 14
The P-6 has both a wafer and a wafer stress locator chuck to accommodate either 2, 3,
4, 5 or 6 inch samples.
The chuck has a series of holes that accept pins to provide precision alignment of the
sample. The pair of holes are used for aligning the wafer flat or for non-flatted wafer,
the edge of the sample. The single hole is for aligning the other edge of the sample.
To switch between wafer sizes, move the pins between wafer holes..
The stress chuck is placed on top of the standard chuck, using three pins at the edge of
the chuck to align the two samples. The stress chuck has the same pin holes as the
standard chuck for alignment of the sample. In addition, it has three stress pins that
need to be placed in the correct position to properly support the sample during the
stress measurements.
Figure 14.25 P-6 Precision Standard Locator Chuck
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