KLA Tencor P-16+ - Figure 3.20 Scan Time - Scan Parameters Definition

Scan Recipes - Creating and Editing a Scan Recipe KLA-Tencor P-16+ / P-6 User’s Guide
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3/13/09
Scan Time Parameters (2D and 3D) - Scan Parameters Definition 3
The Scan Time parameters box displays time and data point values, broken down into
general components. (See Figure 3.20.) No values can be set or defined in this portion
of the screen. These values are read only because they are determined by parameters
set in other fields.
Individual Traces (s)
This defines the number of seconds required to complete one scan. This time
parameter divides
X Scan Size (μm) by Scan speed (μm/s) and adds the result to the
approximate move time.
NOTE: These values are system generated from parameters set in
other fields.
Figure 3.20 Scan Time - Scan Parameters Definition
The Scan Time parameters
are display only.