KLA Tencor P-16+ - Appendix A P Series Profiler - Preparing for Shipment; Table B.1 Minimum Parts Required

0142530-000 AB KLA-Tencor Confidential B-1
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide P Series Profiler - Preparing for Shipment - Introduction
P SERIES PROFILER - PREPARING FOR SHIPMENTAppendix A
A
INTRODUCTION 1
The purpose of this section is to provide the guidelines and steps required for the
proper, safe shipment of the P series Profiler tools. This appendix includes
instructions for both Hardware and Software.
Required tools 1
Table B.1 Minimum Parts Required
PROCEDURE 1
1. Open the front door to the Profiler and locate the two large black knobs on the
upper front and rear of the left side panel.
2. Remove each of these knobs and lift the left side panel away from the Profiler.
3. Using the Profiler software, move the XY stage so it is centered directly beneath
the measurement head.
4. Install the protection plate on the under side of the measurement head by
aligning the four holes on the bottom of the head with the 4 pins on the plate,
placing the hole in the plate directly below the stylus tip.
5. Push upward to lock the protection plate into place.
6. Install the stage shipping clamp (yoke) onto the XY chuck so it is centered
beneath the protection plate on the head (with the padded edges resting directly
on the left and right sides of the X drive assembly). Have ¼" clearance between
the clamp and the Guide bar so that when we pull down, we don't push against
the leadscrew bearings.
NOTE: Pull out interlock override on sides and close the front door. The
elevator post should spin down below the elevator casting as visible in the
center of the elevator. Should have about ¼" clearance before and 1/8"
after tightening turnbuckle.)
Item Description Ext
Qty
176931 HOOK,"S",3/16 DIA,STEEL 2
176940 TURNBUCKLE,HOOK&EYE,114DIAX6" 1
280380 PROTECTIVE PLATE ASSY,M2 1
118699 CLAMP ASSY,SHIPPING,P1 1
248142 CRATE,SHIPPING,P10 1