KLA Tencor P-16+ - V Ideo C Alibration

0142530-000 AB KLA-Tencor Confidential 12-3
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Calibrations - Video Calibration
4. Click Save/Close button to save the calibration results. (See Figure 12.3.)
OR, click
Cancel to retain the old calibration results.
VIDEO CALIBRATION 12
Check the Calibration
Matrix on page 12-1 for
possible interaction with
other calibrations.
Introduction 12
Video calibration ensures that the stage position is correlated to the video image on
the screen. The calibration calculates the
video pixels
/
micron
. This means that when a
position on the video screen is clicked, that position moves to the screen crosshair.
This calibration works two different ways depending on whether or not the Profiler
system has the Pattern Recognition option (P-16+ only). Both calibration procedures
are presented.
1. In this procedure, using the ProCal Wafer is recommended. The directions in
this procedure include loading a sample, like the ProCal Wafer.
Video Calibration Procedure 12
1. Click the Calibration icon. The Calibrations screen is displayed.
2. Choose
Video. The XY View Video Calibration screen appears. (See Figure
12.4.)
CAUTION: Do Not Manually Change any of the numbers in the fields.
NOTE: It is recommended to use Video Calibration procedure with
pattern recognition, if available. The procedure using pattern
recognition is covered first, starting on Page 12-3.