3D Stress (optional Feature, P-16+ only) - KLA-Tencor P-16+ / P-6 User’s Guide
10-16 KLA-Tencor Confidential 0142530-000 AB
3/13/09
From the Save As window shown in Figure 10.16, select the file type XML -
KLA-Tencor P-16+ Discs. Once the Save button is selected, the system will save two
files having the same name and different file extensions, .XML and .MAP.
Figure 10.15 Angular Data Image in Apex Software
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