KLA Tencor P-16+ - Table 3.21 Feature Detection Descriptions (See Figure 3.24 and Figure 3.25.)

Scan Recipes - Creating and Editing a Scan Recipe KLA-Tencor P-16+ / P-6 User’s Guide
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Selecting a feature for detection:
1. Click the menu arrow next to the feature box to display its menu.
2. Click the desired feature to select it. If necessary, use the scroll bar to reveal
other features.
Table 3.21 Feature Detection Descriptions (See Figure 3.24 and Figure 3.25.)
Feature Description
None No feature detection is being used.
UpEdge At the trailing edge of a feature rise, it is the point at which
the trace begins the plateau. (See Figure 3.24.)
NOTE: This point location can be modified by using Distance
to Edge
parameter in the General Parameters Window.
UpBase At the trailing edge of a plateau, it is the point at which the
trace begins to turn upward. (See Figure 3.24.)
DownEdge At the trailing edge of a plateau, it is the point at which the
trace begins to turn downward. (See Figure 3.24.)
DownBase At the trailing edge of a feature decline, it is the point at
which the trace begins the plateau. (See Figure 3.24.)
Convex This is the point at the apex of a convex feature. (See
Figure 3.25.)
Concave This is the point at the apex of a concave feature. (See
Figure 3.25.)
Bump This is detection of a bump feature, similar to concave,
except it supports width and height calculations common to
solar cell lines and C4 bumps.
Model This is detection of features that cannot be easily found with
the other available algorithms (e.g: upedge, convex, bump,
etc). Model feature detection is a very powerful analysis tool
for oddly shaped feature, features without clearly defined
edges, features that can change shape based on process
conditions, shallow step heights, etc.