KLA Tencor P-16+ - Elevator Focus Speed

0142530-000 AB KLA-Tencor Confidential 14-9
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Configuration - Stage Configuration
Elevator Focus Speed 14
This is the speed at which the elevator lowers the head toward the sample surface
until it reaches the Proximity Sensor Trip Position. When it reaches the trip position,
it proceeds with the Elevator Slow Focus Speed until Soft Null or Null is reached,
depending on whether the proximity sensor is being used. (See Figure 14.7 on page
14-7, also Figure 14.8.)
Settings Determining Trip Position 14
 If the proximity sensor is not on, the Elevator Focus Speed is active until
the elevator reaches 1mm above the Lowest Elevator Position, at which
point the Elevator Slow Focus Speed is activated.
 If the proximity sensor is on, the Elevator Focus Speed is active until the
proximity sensor trip position is reached, at which time the Elevator Slow
Focus Speed is activated.
Elevator Speed 14
The elevator speed in this setting cannot exceed 1000
µm
/second if the proximity
sensor is off. Otherwise, if it is on, the speed is 2000
µm
/second
Elevator Slow Focus Speed 14
The Elevator Slow focus Speed is the speed at which the elevator lowers the head
from the Elevator Focus Speed trip position until null is accomplished. (See Figure
14.7 on page 14-7 also Figure 14.8.)
Move Elevator to Safe Position Before Moving Stage 14
This checkbox works in conjunction with the Elevator Safe Position variable. If this
box is checked, the elevator moves the head up to the recorded height in the Elevator
Safe Position variable field. This prevents the stylus from contacting the surface of an
ununiform or tilted sample as the sample moves from one location to another. (See the
checkbox in Figure 14.7 on page 14-7 also Figure 14.8.)
NOTE: Proximity sensor is in P-16+ only.