0142530-000 AB KLA-Tencor Confidential 1-1
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Introduction & Safety - Instrument Overview
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INTRODUCTION & SAFETY Chapter 1
1
INSTRUMENT OVERVIEW 1
The KLA-Tencor P-16+ / P-6 Profiler is a highly sensitive surface profiler that
measures step height, roughness, and waviness on sample surfaces. The KLA-Tencor
Profiler systems use stylus-based scanning to achieve high resolution.
The P-16+ / P-6 system offers the option between three head configurations, each
with a different vertical range: the MicroHead II V SR (standard range), MicroHead
V LF(low force), and the MicroHead V XR (extended range).
The MicroHead V SR (standard range) has a vertical range of 327
μm and is
capable of scanning at forces between 0.5 and 50 mg.
The MicroHead V LF (low force) has a vertical range of 131
μm. It is capable
of scanning with a stylus force between 0.05 and 50 mg. Low force is useful
when scanning soft materials such as gold, indium, or photoresist.
The MicroHead V XR (extended range) extends the vertical range to 1000
μm.
It is capable of scanning at forces between 0.5 and 50 mg.
Contact KLA-Tencor for detailed specifications.
SAFETY 1
Introduction 1
This safety chapter presents an overview of the safety issues involved in the
use of the P-16+ Profiler or P-6 Profiler system.
This Chapter describes:
♦
Safety Symbols and Related Keywords on page 1-1
♦
Lockout/Tagout Procedure on page 1-3
♦
Stage and Head Movement Hazards on page 1-4
Safety Symbols and Related Keywords 1
WARNING: Warnings indicate a potentially hazardous situation which,
if not avoided, could result in personal injury or death.
CAUTION: Cautions indicate that equipment could be damaged, the
operating environment compromised, or data could be lost or
corrupted.
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