KLA Tencor P-16+ - Figure 14.26 P-6 Stress Chuck

Configuration - P-6 Precision Locators KLA-Tencor P-16+ / P-6 User’s Guide
14-26 KLA-Tencor Confidential 0142530-000 AB
3/13/09
Figure 14.26 P-6 Stress Chuck
Stress Pin for Wafer
Placement
Locator Pins