0142530-000 AB KLA-Tencor Confidential 4-25
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide XY View Screen - Using Die Grid Navigation (Optional Feature, P-16+ only)
At the bottom of the die grid navigation window is a representation of the die
grid, which appears as a bounded white rectangle. The taught feature is pictured
a small bounded box appearing in its relative position in the die. This makes it
easier for the operator to locate the feature if a visual search is necessary.
17. Click
OK (bottom center of the screen) to save the die grid.
A save dialog box appears.
18. Choose the drive and directory for storage of the die grid file.
19. Ensure that the proper file format is chosen for saving the die grid file. Click the
Save As Type: menu arrow to display its menu and choose the required format
from the menu.
20. Type a name for the die grid in the
File name: variable box.
21. Click
Save.
The extension *.die is supplied automatically. Die Grid Navigation is enabled
with the new die grid applied. Using Die Grid Navigation (Optional Feature,
P-16+ only) on page 4-16 describes how to use Die Grid Navigation with
sequences.
Loading a Die Grid (Turning ON Die Grid Navigation) for a
Single Scan 4
1. Ensure that the wafer is in place on the stage. It must have the same pattern as
that of the die grid being loaded.
2. In the
XY View, Scan Editor, or Sequence Editor windows, click Die Grid from the
menu bar. (See Figure 4.21.)
CAUTION: It is very important that the wafer is placed in the same
orientation that the die grid was taught. If not, the system cannot find
the dies. Use a precision locator to place the wafer in the proper
orientation.
To Next Page
Loading...